Advanced multiphase modeling of semiconductor manufacturing equipment & processes

To manufacture a semiconductor device/wafer, hundreds of process steps are needed that employ dozens of processing equipment for lithography, diffusion, implantation, etching, deposition, metallization, chemical-mechanical polishing, cleaning, etc.

The understanding of complex multiphase and Multiphysics involved in semiconductor manufacturing processes has never been mature due to its complexity and the fast-changing characteristics of the industry. We still primarily rely on trial-and-error and DOE (design of experiments) for process evaluation and tuning. Computational modeling helps us better understand and optimize semiconductor fabrication stages, like etching, deposition, and cleaning, through thermal, flow, and reaction simulations, thus significantly impacting product development.

Through this webinar, we aim to share how Siemens solutions are currently being successfully used in the Semiconductor industry for simulating wafer manufacturing processes.

Join this webinar to learn:

• How Siemens industry-leading solutions are currently contributing towards the growth of the semiconductor industry.
• Understand the complexities of semiconductor manufacturing processes, including multiphase and multi-physics aspects, to optimize production.
• Stress the significance of computational modeling in optimizing semiconductor fabrication stages.